Fabrication, Characterization and Application of Lead Titanate Zircona

Lead zirconate titanate (PZT) piezoceramic had been researched extensively to improve its piezoelectric properties for various applications in actuators, resonators, transducers, etc. In this book, PZT piezoceramics prepared at a composition Zr/Ti~53/47,contiguous to a morphotropic phase boundary (MPB) with gel powder synthesized by the chemical solution deposition (CSD) method utilizing less hazardous propyl alcohol as a solvent were developed. The PZT thin films with lower gel concentration of 0.2 M and 0.3 M were used, and deposited on Al/Si3N4/Si (100) substrate. Besides, we also fabricated a device on PZT ferroelectric thin films by lift-off method for a SAW resonator.