Lead zirconate titanate (PZT) piezoceramic had been researched extensively to improve its piezoelectric properties for various applications in actuators, resonators, transducers, etc. In this book, PZT piezoceramics prepared at a composition Zr/Ti~53/47,contiguous to a morphotropic phase boundary (MPB) with gel powder synthesized by the chemical solution deposition (CSD) method utilizing less hazardous propyl alcohol as a solvent were developed. The PZT thin films with lower gel concentration of 0.2 M and 0.3 M were used, and deposited on Al/Si3N4/Si (100) substrate. Besides, we also fabricated a device on PZT ferroelectric thin films by lift-off method for a SAW resonator.